JPH0432344B2 - - Google Patents

Info

Publication number
JPH0432344B2
JPH0432344B2 JP61314243A JP31424386A JPH0432344B2 JP H0432344 B2 JPH0432344 B2 JP H0432344B2 JP 61314243 A JP61314243 A JP 61314243A JP 31424386 A JP31424386 A JP 31424386A JP H0432344 B2 JPH0432344 B2 JP H0432344B2
Authority
JP
Japan
Prior art keywords
amorphous semiconductor
ion
semiconductor layer
ion sensor
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61314243A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63165747A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61314243A priority Critical patent/JPS63165747A/ja
Publication of JPS63165747A publication Critical patent/JPS63165747A/ja
Publication of JPH0432344B2 publication Critical patent/JPH0432344B2/ja
Granted legal-status Critical Current

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Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP61314243A 1986-12-26 1986-12-26 非晶質半導体イオンセンサ Granted JPS63165747A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61314243A JPS63165747A (ja) 1986-12-26 1986-12-26 非晶質半導体イオンセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61314243A JPS63165747A (ja) 1986-12-26 1986-12-26 非晶質半導体イオンセンサ

Publications (2)

Publication Number Publication Date
JPS63165747A JPS63165747A (ja) 1988-07-09
JPH0432344B2 true JPH0432344B2 (en]) 1992-05-29

Family

ID=18051011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61314243A Granted JPS63165747A (ja) 1986-12-26 1986-12-26 非晶質半導体イオンセンサ

Country Status (1)

Country Link
JP (1) JPS63165747A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7329850B2 (ja) 2020-12-16 2023-08-21 太平洋精工株式会社 電気回路遮断装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57191539A (en) * 1981-05-21 1982-11-25 Nec Corp Semiconductor ion sensor
JPS6082846A (ja) * 1983-10-12 1985-05-11 Sumitomo Electric Ind Ltd 電界効果型半導体センサ

Also Published As

Publication number Publication date
JPS63165747A (ja) 1988-07-09

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